A new technical paper titled “Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness” was published by researchers at Samsung, ASML and ...
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Nikon plans to undercut ASML on price to win back chipmaking lithography customers
Nikon will try to claw back lithography customers by selling argon fluoride (ArF) tools for less than the market leader, ASML ...
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